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Fabrication of hydrogenated microcrystalline silicon thin films using RF magnetron sputtering

Author(s):
  • H.-W. Wang ( National Central Univ. (Taiwan) )
  • W.-N. Su ( National Central Univ. (Taiwan) )
  • C.-W. Han ( National Central Univ. (Taiwan) )
  • S.-H. Chen ( National Central Univ. (Taiwan) )
  • C.-C. Lee ( National Central Univ. (Taiwan) )
Publication title:
Thin-film coatings for optical applications IV : 29-30 August 2007, San Diego, California, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6674
Pub. Year:
2007
Page(from):
66740B-1
Page(to):
66740B-9
Pages:
9
Pub. info.:
Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers
ISSN:
0277786X
ISBN:
9780819468222 [0819468223]
Language:
English
Call no.:
P63600/6674
Type:
Conference Proceedings

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