1.

Conference Proceedings
Conference Proceedings
1. Porosity characteristics of ultra-low dielectric insulator films directly patterned by nano- imprint .lithography
H. W. Ro ; R. L. Jones ; H. Peng ; H.-J. Lee ; E. K. Lin
Pub. info.: Emerging lithographic technologies XII.  1  pp.69211M-1-69211M-11,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6921
2.

Conference Proceedings
Conference Proceedings
2. Exploring the limitations of x-ray reflectivity as a critical dimension pattern shape metrology
H.-J. Lee ; S. Kim ; C. L. Soles ; E. K. Lin ; W. Wu
Pub. info.: Metrology, inspection, and process control for microlithography XXII.  2  pp.692224-1-692224-8,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6922