1.

Conference Proceedings

Conference Proceedings
K. Shim ; J.J. Seo ; S. Choi ; H. Yang ; J. Kim
Pub. info.: SiGe and Ge, materials, processing, and devices.  pp.231-242,  2006.  Pennington, N.J..  Electrochemical Society
Title of ser.: ECS transactions
Ser. no.: 3(7)
2.

Technical Paper

Technical Paper
J. Kim ; C. Sohn ; I. Lee ; H. Yang
Pub. info.: AIAA meeting papers on disc.  2006.  Reston, Va.  American Institute of Aeronautics and Astronautics
Title of ser.: AIAA Paper : AIAA Atmospheric Flight Mechanics Conference
Ser. no.: 2006
3.

Conference Proceedings

Conference Proceedings
H. Yang ; J. Kim ; J. Hong ; D. Yim ; T. Hasebe ; M. Yamamoto
Pub. info.: Metrology, inspection, and process control for microlithography XXI.  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6518
4.

Conference Proceedings

Conference Proceedings
C. Park ; J. Hong ; K. Yang ; T. Theeuwes ; F. Gautier ; Y. Min ; A. Chen ; H. Yang ; D. Yim ; J. Kim
Pub. info.: Optical microlithography XX.  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6520
5.

Conference Proceedings

Conference Proceedings
J. Kim ; T. Lee ; A. Jung ; G. Yoo ; H. Yang
Pub. info.: Lithography Asia 2008.  2  pp.71403G-1-71403G-11,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 7140
6.

Conference Proceedings

Conference Proceedings
H. Yang ; J. Kim ; A. Jung ; T. Lee ; D. Yim
Pub. info.: Metrology, inspection, and process control for microlithography XXII.  2  pp.692239-1-692239-7,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6922
7.

Conference Proceedings

Conference Proceedings
C. Kim ; J. Kim ; J. Choi ; H. Yang ; D. Yim
Pub. info.: Design for manufacturability through design-process integration : 28 February-2 March 2007, San Jose, California, USA.  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6521
8.

Conference Proceedings

Conference Proceedings
J. Kim ; H. Yang ; J. Song ; D. Yim ; T. Hasebe ; M. Yamamoto
Pub. info.: Design for manufacturability through design-process integration : 28 February-2 March 2007, San Jose, California, USA.  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6521
9.

Conference Proceedings

Conference Proceedings
S. Yun ; J. Song ; I. Yeo ; Y. Choi ; V. Yurlov ; S. An ; H. Park ; H. Yang ; Y. Lee ; K. Han ; I. Shyshkin ; A. Lapchuk ; K. Oh ; S. Ryu ; J. Jang ; C. Park ; C. Kim ; S. Kim ; E. Kim ; K. Woo ; J. Yang ; J. Kim ; S. Byun ; S. Lee ; O. Lim ; J. Cheong ; Y. Hwang ; G. Byun ; J. Kyoung ; S. Yoon ; J. Lee ; T. Lee ; S. Hong ; Y. Hong ; D. Park ; J. Kang ; W. Shin ; S. Oh ; B. Song ; H. Kim ; C. Koh ; Y. Ryu ; H. Lee ; Y. Baek
Pub. info.: Emerging liquid crystal technologies II : 21-22 and 24 January 2007, San Jose, California, USA.  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6487