1.
Conference Proceedings
P. Dirksen ; W. de Laat ; H. Megens
Pub. info.:
Optical/laser microlithography VIII : 22-24 February, 1995, Santa Clara, California . pp.701-711, 1995. Bellingham, WA. Society of Photo-optical Instrumentation Engineers
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
2440
2.
Conference Proceedings
H. Megens ; R. van Haren ; S. Musa ; M. Doytcheva ; S. Lalbahadoersing ; M. van Kemenade ; H. Lee ; P. Hinnen ; F. van Bilsen
Pub. info.:
Metrology, inspection, and process control for microlithography XXI . 2007. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6518
3.
Conference Proceedings
J. Finders ; M. Dusa ; B. Vleeming ; H. Megens ; B. Hepp
Pub. info.:
Optical Microlithography XXI . 1 pp.692408-1-692408-12, 2008. Bellingham, Wash.. Society of Photo-optical Instrumentation Engineers
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6924