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Control of stresses in highly doped multilayer polysilicon structures used in MEMS applications

Author(s):
Publication title:
Smart materials
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4234
Pub. Year:
2000
Page(from):
232
Page(to):
238
Pages:
7
Pub. info.:
Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819439086 [0819439088]
Language:
English
Call no.:
P63600/4234
Type:
Conference Proceedings

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