Control of stresses in highly doped multilayer polysilicon structures used in MEMS applications
- Author(s):
- Publication title:
- Smart materials
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 4234
- Pub. Year:
- 2000
- Page(from):
- 232
- Page(to):
- 238
- Pages:
- 7
- Pub. info.:
- Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819439086 [0819439088]
- Language:
- English
- Call no.:
- P63600/4234
- Type:
- Conference Proceedings
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