Role of Inhibitors in Presence of Oxidizers in Cu-CMP
- Author(s):
Seal, S. Boyd, M. Desai, V. Akesson, I. Easter, W. Guha, A. - Publication title:
- Chemical Mechanical Planarization : proceedings of the International Symposium
- Title of ser.:
- Electrochemical Society Proceedings Series
- Ser. no.:
- 2000-26
- Pub. Year:
- 2000
- Page(from):
- 288
- Page(to):
- 294
- Pages:
- 7
- Pub. info.:
- Pennington, N.J.: Electrochemical Society
- ISSN:
- 01616374
- ISBN:
- 9781566772938 [1566772931]
- Language:
- English
- Call no.:
- E23400/200026
- Type:
- Conference Proceedings
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