1.

Conference Proceedings
Conference Proceedings
1. Direct-Write Deposition of Silicon Oxide - The Express Lane towards patterned thin Films
Wanzenboeck, H.D. ; Harasek, S. ; Bertagnolli, E. ; Gritsch, M. ; Hutter, H. ; Brenner, J. ; Stoeri, H. ; Grabner, U. ; Hammer, G. ; Pongratz, P.
Pub. info.: Silicon nitride and silicon dioxide thin insulating films VII : proceedings of the international symposium.  pp.369-380,  2003.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2003-2
2.

Conference Proceedings
Conference Proceedings
2. Ion Beam Induced Chemical Vapor Deposition of Dielectric Materials
Wanzenboeck, H.D. ; Lugstein, A. ; Langfischer, H. ; Bertagnolli, E. ; Gritsch, M. ; Hutter, H.
Pub. info.: Materials development for direct write technologies : symposium held April 24-26, 2000, San Francisco, California, U.S.A..  pp.163-170,  2001.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 624