1.

Conference Proceedings
Conference Proceedings
1. Comparison of Copper CVD Using Cu(fod)2 and Cu(hfac)2 Reduction
Boey, J. S. ; Griffin, G. L. ; Maverick, A. W. ; Fan, H.
Pub. info.: Advanced interconnects and contacts : symposium held April 5-7, 1999, San Francisco, California, U.S.A..  pp.251-,  1999.  Warrendale, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 564
2.

Conference Proceedings
Conference Proceedings
2. Solution Delivery for Copper CVD Using Cu(hfac)2 Reduction
Zeng, C. ; Borgharkar, N. S. ; Griffin, G. L. ; Fan, H. ; Maverick, A. W.
Pub. info.: Advanced interconnects and contact materials and processes for future integrated circuits : symposium held April 13-16, 1998, San Francisco, California, U.S.A..  pp.315-,  1998.  Warrendale, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 514