FACET FORMATION OF LINESHAPED SILICON MESAS GROWN WITH MICRO SHADOW MASKS
- Author(s):
Gossner, H. Fehlauer, G. Kiunke, W. Eisele, I. Stolz, M. Hintermaier, M. Knapek, E. - Publication title:
- Molecularly designed ultrafine/nanostructured materials : symposium held April 4-8, 1994, San Francisco, California, U.S.A.
- Title of ser.:
- Materials Research Society symposium proceedings
- Ser. no.:
- 351
- Pub. Year:
- 1994
- Page(from):
- 393
- Pub. info.:
- Pittsburgh, Pa.: MRS - Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558992511 [1558992510]
- Language:
- English
- Call no.:
- M23500/351
- Type:
- Conference Proceedings
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