1.

Conference Proceedings

Conference Proceedings
Spense, C. ; Goad, S. ; Buck, P. ; Gladhill, R. ; Cinque, R. ; Preuninger, J. ; Griesinger, U ; Blocker, M.
Pub. info.: EMLC 2006 : 22nd European Mask and Lithography Conference : 23-26 January 2006, Dresden, Germany.  pp.62810H-,  2006.  Bellingham, Wash.,.  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6281
2.

Conference Proceedings

Conference Proceedings
Horstmann, M. ; Greenlaw, D. ; Huebler, P. ; Stephan, R. ; Feudel, Th. ; Wei, A. ; Frohberg, K. ; Hoentschel, J. ; Javorka, P. ; Burbach, G. ; Schwan, C. ; Peters, C. ; Lenski, M ; Press, P. ; Kammler, Th. ; Bierstedt, H. ; Otterbach, R. ; Neu, A. ; Wieczorek, K. ; Schaller, M. ; Salz, H. ; Hohage, J. ; Ruelke, H. ; Klais, J. ; Grasshoff, G. ; Ehrichs, E. ; Goad, S. ; Raab, M. ; Kepler, N.
Pub. info.: Silicon-on-insulator technology and devices XII : proceedings of the international symposium.  pp.57-68,  2005.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2005-03