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Precision Thickness Measurement of Ultra-Thin Films via XPS

Author(s):
Publication title:
Advanced materials processing II : proceedings of the 2nd International Conference on Advanced Materials Processing, Grand Hyatt, Singapore, 2nd-4th December 2002
Title of ser.:
Materials science forum
Ser. no.:
437-438
Pub. Year:
2003
Page(from):
195
Page(to):
198
Pages:
4
Pub. info.:
Uetikon-Zuerich, Switzerland: Trans Tech Publications
ISSN:
02555476
ISBN:
9780878499212 [0878499210]
Language:
English
Call no.:
M23650
Type:
Conference Proceedings

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