Blank Cover Image

TDS and RBS Studies of Ar Implanted to Si

Author(s):
Hanada,R.
Saito,S.
Nagata,S.
Yamaguchi,S.
Shinozuka,T.
Fujioka,M.
1 more
Publication title:
Proceedings of the 18th International Conference on Defects in Semiconductors : ICDS-18, Sendai, Japan, July 23-28, 1995
Title of ser.:
Materials science forum
Ser. no.:
196-201
Pub. Year:
1995
Pt.:
3
Page(from):
1375
Page(to):
1380
Pub. info.:
Zurich, Switzerland: Trans Tech Publications
ISSN:
02555476
ISBN:
9780878497164 [0878497161]
Language:
English
Call no.:
M23650
Type:
Conference Proceedings

Similar Items:

Hanada,R., Shinozuka,T., Fujioka,M.

Trans Tech Publications

Kunimatsu, A., Arai, T., Takahiro, K., Nagata, S., Yamaguchi, S., Akiyama, Y., Sata, N., Ishigame, M.

MRS - Materials Research Society

Silva, Cesar R. S. da, Zawislak, Fernando C.

MRS - Materials Research Society

Kharlamov,V.S., Kulikov,D.V., Trushin,Yu.V., Tsigankov,D.N., Yankov,R.A., Voelskow,M., Skorupa,W., Pezoldt,J.

SPIE-The International Society for Optical Engineering

Paulson, W. M., Wilson, S. R., White, C. W., Appleton, B. R.

North-Holland

da Silva, R. C., da Silva, M. F., Thome, L., Melo, A. A., Soares, J. C.

Materials Research Society

Kuwahara,G., Yamaguchi,S., Nanri,K., Ootani,M., Tetsuka,M., Seto,S., Arai,M., Fujioka,T.

SPIE-The International Society for Optical Engineering

M. Hino, K. Nagata, T. Yoshida, D. Kosemura, K. Kakushima

Electrochemical Society

Fushimi,T., Horisawa,H., Yamaguchi,S., Yasunaga,N., Fujioka,T.

SPIE - The International Society for Optical Engineering

Hasegawa,M., Tang,Z., Chiba,T., Saito,M., Kawasuso,A., Akahane,T., Li,Z.-Q., Kawazoe,Y., Yamaguchi,S.

Trans Tech Publications

Lau, W. M., Ratnam, P., Salama, C. A. T.

Materials Research Society

Mitani, S., Yamaguchi, S., Furukawa, S., Nakata, T., Horino, Y., Ono, R., Hosokawa, Y., Miyamoto, M., Nishino, S.

Trans Tech Publications

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12