1.

Conference Proceedings
Conference Proceedings
1. An image stitching method to eliminate the distortion of the sidewall in linewidth measurement
Zhao, X. ; Fu, J. ; Chu, W. ; Nguyen, C. ; Vorburger, T.V.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XVIII.  pp.363-373,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5375
2.

Conference Proceedings
Conference Proceedings
2. Study of an image stitching method for linewidth measurement
Chu, W. ; Zhao, X. ; Fu, J. ; Vorburger, T.V.
Pub. info.: Photomask and Next-Generation Lithography Mask Technology XI.  pp.776-783,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5446