Critical dimension variations of I-line processes due to swing effects [6152-153]
- Author(s):
Berger, C. ( Infineon Technologies SC300 GmbH & Co. OHG (Germany) ) Schiwon, R. ( Infineon Technologies SC300 GmbH & Co. OHG (Germany) ) Trepte, S. ( Infineon Technologies SC300 GmbH & Co. OHG (Germany) ) Friedrich, M. ( Infineon Technologies SC300 GmbH & Co. OHG (Germany) ) Kubis, M. ( Infineon Technologies SC300 GmbH & Co. OHG (Germany) ) Horst, J ( Infineon Technologies SC300 GmbH & Co. OHG (Germany) ) Grandpierre, A. G. ( Infineon Technologies SC300 GmbH & Co. OHG (Germany) ) - Publication title:
- Metrology, Inspection, and Process Control for Microlithography XX
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 6152
- Pub. Year:
- 2006
- Pt.:
- 2
- Page(from):
- 61523T
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819461957 [0819461954]
- Language:
- English
- Call no.:
- P63600/6152
- Type:
- Conference Proceedings
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