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Critical dimension variations of I-line processes due to swing effects [6152-153]

Author(s):
Berger, C. ( Infineon Technologies SC300 GmbH & Co. OHG (Germany) )
Schiwon, R. ( Infineon Technologies SC300 GmbH & Co. OHG (Germany) )
Trepte, S. ( Infineon Technologies SC300 GmbH & Co. OHG (Germany) )
Friedrich, M. ( Infineon Technologies SC300 GmbH & Co. OHG (Germany) )
Kubis, M. ( Infineon Technologies SC300 GmbH & Co. OHG (Germany) )
Horst, J ( Infineon Technologies SC300 GmbH & Co. OHG (Germany) )
Grandpierre, A. G. ( Infineon Technologies SC300 GmbH & Co. OHG (Germany) )
2 more
Publication title:
Metrology, Inspection, and Process Control for Microlithography XX
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6152
Pub. Year:
2006
Pt.:
2
Page(from):
61523T
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819461957 [0819461954]
Language:
English
Call no.:
P63600/6152
Type:
Conference Proceedings

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