1.

Conference Proceedings
Conference Proceedings
1. Laser PG performance for 100-nm photomasks
Rosling, M. ; Karawajczyk, A. ; Askebjer, P. ; Zerne, R. ; Carroll, A.M. ; Eklund, R. ; Fosshaug, H. ; Sandstrom, T.
Pub. info.: 22nd Annual BACUS Symposium on Photomask Technology.  Part Two  pp.759-766,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4889
2.

Conference Proceedings
Conference Proceedings
2. Influence of writing strategy on CD control for the spatial-light-modulator-based Sigma7300 DUV laser pattern generator
Fosshaug, H. ; Askebjer, P. ; Karlsson, J. ; Bajramovic, A. ; Xing, K. ; Eklund, R. ; Walford, J. ; Ekberg, M. ; Hogfeldt, P. ; ystrym, T.
Pub. info.: Advances in Resist Technology and Processing XXI.  pp.879-894,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5376