1.

Conference Proceedings
Conference Proceedings
1. Diffusion Studies Of Cu In Si And Low-K Dielectric Materials
Prasad, K. ; Yuan, X.L. ; Tan, C.M. ; Zhang, D.H. ; Li, C. Y. ; Wang, S.R. ; Yuan, S.Y.J. ; Xie, J.L. ; Gui, D. ; Foo, P.D.
Pub. info.: Silicon materials - processing characterization and reliability : symposium held April 1-5, 2002, San Francisco, California, U.S.A..  pp.395-400,  2002.  Warrendale.  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 716
2.

Conference Proceedings
Conference Proceedings
2. Effects Of A Thin Flash Copper Layer On The Diffusion Of Cu, Ta, Si, And O In The Cu/TaN/SiO2/Si Structures
Loh, S.W. ; Zhang, D.H. ; Li, C.Y. ; Liu, R. ; Wee, A.T.S. ; Foo, P.D. ; Xie, Joseph ; Prasad, K. ; Tan, C.M. ; Lee, Y.K.
Pub. info.: Semiconductor technology (ISTC 2001) : proceedings of the 1st International Conference on Semiconductor Technology.  pp.116-122,  2001.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2001-17