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Effects Of Focused Ion Beam On ECP Copper

Author(s):
Zhao, S.P.
Koh, L.T.
Zhang, D.H.
Loh, S.A.
Liew, G.M.
Li, C.Y.
Woo, Y.K.
Cheng, C.K.
Foo, P.D.
4 more
Publication title:
Semiconductor technology (ISTC 2001) : proceedings of the 1st International Conference on Semiconductor Technology
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2001-17
Pub. Year:
2001
Page(from):
123
Page(to):
130
Pages:
8
Pub. info.:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566773508 [1566773504]
Language:
English
Call no.:
E23400/200117
Type:
Conference Proceedings

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