1.

Conference Proceedings
Conference Proceedings
1. PFC Emissions Reduction and Process Improvements with Remote Plasma CVD Chamber Cleans
Mendicino, L. ; Brown, P.T. ; Filipiak, S. ; Nauert, C. ; Estep, H. ; Fletcher, M.
Pub. info.: Environmental issues with materials and processes for the electronics and semiconductor industries V : proceedings of the international symposium.  pp.144-156,  2002.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2002-15
2.

Conference Proceedings
Conference Proceedings
2. Epitaxial Layer Lifetime Characterization in the Frequency Domain
Park, J.E. ; Schroder, D.K. ; Tan, SE. ; Choi, B.D. ; Fletcher, M. ; Buczkowski, A. ; Kirscht, F.
Pub. info.: High Purity Silicon VI : proceedings of the sixth International Symposium.  pp.383-395,  2000.  Bellingham, Wash..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2000-17
3.

Conference Proceedings
Conference Proceedings
3. Application Of Room-Temperature Photoluminescence For Characterizing As-Grown And Thermally Processed CZ Silicon Wafers
Kirscht, F. ; Orschel, B. ; Kim, S. ; Rouvimov, S. ; Snegirev, B. ; Fletcher, M. ; Shabani, M. ; Buczkowski, A.
Pub. info.: Defect and impurity engineered semiconductors and devices III : symposium held April 1-5, 2002, San Francisco, California, U.S.A..  pp.173-178,  2002.  Warrendale, Pa.  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 719
4.

Conference Proceedings
Conference Proceedings
4. EMIR: the GTC NIR multi-object imager spectrograph
Eikenberry, S. S. ; Elston, R. ; Raines, S. N. ; Julian, J. ; Hanna, K. ; Hon, D. ; Julian, R. ; Corley, R. ; Rashkin, D. ; Leckie, B. ; Gardhouse, W. R. ; Fletcher, M. ; Dunn, J. ; Wooff, R.
Pub. info.: Ground-based instrumentation for astronomy : 21-25 June 2004, Glasgow, Scotland, United Kingdom.  pp.1187-1195,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5492
5.

Conference Proceedings
Conference Proceedings
5. Photoluminescence Intensity Analysis in Application To Contactless Characterization of Silicon Wafers*
Buczkowski, A. ; Orsehel, B. ; Kim, S. ; Rouvimov, S. ; Snegirev, B. ; Fletcher, M. ; Kirscht, F.
Pub. info.: High purity silicon VII : proceedings of the international symposium.  pp.299-310,  2002.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2002-20
6.

Conference Proceedings
Conference Proceedings
6. WFOS: a wide field optical spectrograph for the Thirty Meter Telescope [6269-70]
Pazder, J. S. ; Roberts, S. ; Abraham, R. ; Anthony, A. ; Fletcher, M. ; Hardy, T. ; Loop, D. ; Sun, S.
Pub. info.: Ground-based and Airborne Instrumentation for Astronomy.  pp.62691X-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6269
7.

Conference Proceedings
Conference Proceedings
7. The optical design of the wide field optical spectrograph for the Thirty Meter Telescope [6269-114]
Pazder, J. S. ; Fletcher, M. ; Morbey, C.
Pub. info.: Ground-based and Airborne Instrumentation for Astronomy.  pp.626932-626932,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6269