1.
Conference Proceedings
Tao, Y. ; Fasching, R.J. ; Prinz, F.B.
Pub. info.:
Smart structures and materials 2004 : smart electronics, MEMS, BioMEMS, and nanotechnology : 15-18 March 2004, San Diego, California, USA . pp.431-442, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5389
2.
Conference Proceedings
Fasching, R.J. ; Tao, Y. ; Hammerick, K. ; Prinz, F.B.
Pub. info.:
Smart Sensors, Actuators, and MEMS . 1 pp.128-135, 2003. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5116
3.
Conference Proceedings
Bai, S.J. ; Fasching, R.J. ; Prinz, F.B.
Pub. info.:
Smart Sensors, Actuators, and MEMS . 2 pp.536-542, 2003. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5116
4.
Conference Proceedings
Fasching, R.J. ; Tao, Y. ; Prinz, F.B.
Pub. info.:
Micromachining and Microfabrication Process Technology IX . pp.53-64, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5342