1.

Conference Proceedings
Conference Proceedings
1. DAMASCENE METAL GATE FOR 70 nm CMOS PROCESS
Guillaumot, B. ; Ducroquet, F. ; Ernst, T. ; Guegan, G. ; Galon, C. ; Renard, C. ; PrevitaIi, B. ; Rivoire, M. ; Nier, M.E. ; Tedesco, S. ; Fargeot, T. ; Achard, H. ; Deleonibus, S.
Pub. info.: Semiconductor silicon 2002 : proceedings of the ninth International Symposium on Silicon Materials Science and Technology.  pp.793-802,  2002.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2002-2
2.

Conference Proceedings
Conference Proceedings
2. DAMASCENE METAL GATE FOR 70 nm CMOS PROCESS
Guillaumot, B. ; Ducroquet, F. ; Ernst, T. ; Guegan, G. ; Galon, C. ; Renard, C. ; PrevitaIi, B. ; Rivoire, M. ; Nier, M.E. ; Tedesco, S. ; Fargeot, T. ; Achard, H. ; Deleonibus, S.
Pub. info.: Semiconductor silicon 2002 : proceedings of the ninth International Symposium on Silicon Materials Science and Technology.  pp.793-802,  2002.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2002-2