Blank Cover Image

Using carbon nanotube cantilevers in scanning probe metrology

Author(s):
Schlaf, R. ( Univ. of South Florida (USA) )
Emirov, Y.
Bieber, J.A.
Sikder, A.
Kohlscheen, J.
Walters, D.A. ( Univ. of Central Florida (USA) )
Islam, M.R.
Metha, B.
Ren, Z.F. ( Boston College (USA) )
Shofner, T.L. ( Agere Systems (USA) )
Rossie, B.B.
Cresswell, M.W. ( National Institute of Standaras and Technology (USA) )
7 more
Publication title:
Metrology, Inspection, and Process Control for Microlithography XVI
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4689
Pub. Year:
2002
Vol.:
Part One
Page(from):
53
Page(to):
57
Pages:
5
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819444356 [0819444359]
Language:
English
Call no.:
P63600/4689
Type:
Conference Proceedings

Similar Items:

Emirov, Y.N., Beerbom, M., Walters, D.A., Ren, Z.F., Huang, Z.P., Rossie, B.B., Schlaf, R.

SPIE-The International Society for Optical Engineering

Guillaume,N., Lahti,M., Cresswell,M.W., Allen,R.A., Linholm,L.W., Zaghloul,M.E.

SPIE-The International Society for Optical Engineering

Emirov, Y.N., Schumacher, J.D., Lagel, B., Nguyen, N., Ren, Z., Huang, Z., Rossie, B.B., Schlaf, R.

SPIE - The International Society of Optical Engineering

Olson, S., Sankaran, B., Altemus, B., Xu, B., Geer, R.

SPIE - The International Society of Optical Engineering

Islam, M.R., Chakma, A.

American Institute of Chemical Engineers

Park, B. C., Ahn, S. J., Choi, J., Jung, K. Y., Song,W. Y.

SPIE - The International Society of Optical Engineering

G.R. Ahmed Jamal, M.R. Islam, M.A. Rahman, J.F. Meem, R.A. Sathie

Trans Tech Publications

M.Y. Zhou, Y.L. Tian, Z. Ren, H.Y. Zheng, R.B. Wei

Trans Tech Publications

K. H. An, B. O'Connor, Y. Zhao, W. Loh, K. P. Pipe, M. Shtein

SPIE - The International Society of Optical Engineering

Collier, C. P., Esplandiu, M. J., Bittner, V. G., Shapiro, I. R.

Materials Research Society

Sennett, Michael, Welsh, Elizabeth, Wright, J.B., Li, W.Z., Wen, J.G., Ren, Z.F.

Materials Research Society

Qu, L., Martin, R.B., Huang, W., Fu, K., Zweifel, D., Lin, Y., Bunker, C.E., Harruff, B.A., Gord, J.R., Allard, L.F., …

Electrochemical Society

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12