Using carbon nanotube cantilevers in scanning probe metrology
- Author(s):
Schlaf, R. ( Univ. of South Florida (USA) ) Emirov, Y. Bieber, J.A. Sikder, A. Kohlscheen, J. Walters, D.A. ( Univ. of Central Florida (USA) ) Islam, M.R. Metha, B. Ren, Z.F. ( Boston College (USA) ) Shofner, T.L. ( Agere Systems (USA) ) Rossie, B.B. Cresswell, M.W. ( National Institute of Standaras and Technology (USA) ) - Publication title:
- Metrology, Inspection, and Process Control for Microlithography XVI
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 4689
- Pub. Year:
- 2002
- Vol.:
- Part One
- Page(from):
- 53
- Page(to):
- 57
- Pages:
- 5
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819444356 [0819444359]
- Language:
- English
- Call no.:
- P63600/4689
- Type:
- Conference Proceedings
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