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III-V Nitride Growth by Atmospheric-Pressure MOVPE with a Three-Layered Flow Channel

Author(s):
Uchida, Kazuo
Tokunaga, Hiroki
Inaishi, Yoshiaki
Akutsu, Nakao
Matsumoto, Koh
Itoh, Tsuyoshi
Egawa, Takashi
Jimbo, Takashi
Umeno, Masayoshi
4 more
Publication title:
III-V nitrides : symposium held December 2-6, 1996, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
449
Pub. Year:
1997
Page(from):
129
Pub. info.:
Pittsburgh, PA: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558993532 [1558993533]
Language:
English
Call no.:
M23500/449
Type:
Conference Proceedings

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