1.

Conference Proceedings
Conference Proceedings
1. Fabrication and characterization of piezoelectric cantilever for micro transducers [5852-46]
Xie, J. ; Hu, M. ; Ling, S.-F. ; Du, H.
Pub. info.: Third International Conference on Experimental Mechanics and Third Conference of the Asian Committee on Experimental Mechanics.  pp.283-288,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5852
2.

Conference Proceedings
Conference Proceedings
2. Dynamic testing of micro devices using PZT base excitation [5852-101]
Hu, M. ; Xie, J. ; Ling, S.-F. ; Du, H. ; Fu, Y.
Pub. info.: Third International Conference on Experimental Mechanics and Third Conference of the Asian Committee on Experimental Mechanics.  pp.633-638,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5852
3.

Conference Proceedings
Conference Proceedings
3. Fabrication of PZT microdevices using a high-yield sol-gel process
Hu, M. ; Du, H. ; Xie, J. ; Ling, S.-F. ; Fu, Y.
Pub. info.: Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems II.  pp.180-188,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5650