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Lattice Strain and Composition of Boron-Interstitial Clusters in Crystalline Silicon

Author(s):
Salvador, D.De
Bisognin, G.
Napolitani, E.
Aldegheri, L.
Drigo, A.V.
Carnera, A.
Mirabella, S.
Bruno, E.
Impellizzeri, G.
Priolo, F.
5 more
Publication title:
Silicon front-end junction formation : physics and technology : symposium held April 13-15, 2004, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
810
Pub. Year:
2004
Page(from):
301
Page(to):
306
Pages:
6
Pub. info.:
Warrendale, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558997608 [1558997601]
Language:
English
Call no.:
M23500/810
Type:
Conference Proceedings

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