Patterning with 193 nm Resists
- Author(s):
Bakshi, V. Smith, G. Alzaben, T. Beach, J. Spurlock, K. Berger., R. Dorris, S.-T.L. Holladay, D. Woehl, J. - Publication title:
- Thin film materials, processes, and reliability : proceedings of the international symposium
- Title of ser.:
- Electrochemical Society Proceedings Series
- Ser. no.:
- 2001-24
- Pub. Year:
- 2001
- Page(from):
- 31
- Page(to):
- 41
- Pages:
- 11
- Pub. info.:
- Pennington, N.J.: Electrochemical Society
- ISSN:
- 01616374
- ISBN:
- 9781566773577 [1566773571]
- Language:
- English
- Call no.:
- E23400/200124
- Type:
- Conference Proceedings
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