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Pub. info.:
Proceedings of the Fourth International Symposium on Semiconductor Wafer Bonding : science, technology, and applications. pp.171-178, 1997. Pennington, NJ. Electrochemical Society
Proceedings of the Seventh International Symposium on Silicon Materials Science and Technology. pp.432-442, 1994. Pennington, NJ. Electrochemical Society
Desmond, C.A. ; Hobart, K. ; Kub, F. ; Campisi, G. ; Weldon, M.
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Proceedings of the Fourth International Symposium on Semiconductor Wafer Bonding : science, technology, and applications. pp.459-465, 1997. Pennington, NJ. Electrochemical Society
Proceedings of the Fourth International Symposium on Semiconductor Wafer Bonding : science, technology, and applications. pp.466-472, 1997. Pennington, NJ. Electrochemical Society
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