Deng, X. ; Wang, J. ; Liu, F. ; Sciortino, F. P. ; Liu, X. Jr., ; Graham, A.
Pub. info.:
Nanostructure Integration Techniques for Manufacturable Devices, Circuits, and Systems: Interfaces, Interconnects, and Nanosystems. pp.60030X-, 2005. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering