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Structural Characterization of SiF4, SiH4 and H2 Hot-Wire-Grown Microcrystalline Silicon Thin Films With Large Grains

Author(s):
Gutierrez, J.J.
Inglefield, C.E.
An, C.P.
DeLong, M.C.
Taylor, P.C.
Morrison, S.
Madan, A.
2 more
Publication title:
Amorphous and heterogeneous silicon-based films - 2001 : symposium held April 16-20, 2001, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
664
Pub. Year:
2001
Pages:
6
Pub. info.:
Warrendale: Materials Research Society
ISSN:
02729172
ISBN:
9781558996007 [1558996001]
Language:
English
Call no.:
M23500/664
Type:
Conference Proceedings

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