1.

Conference Proceedings
Conference Proceedings
1. HEAVY METAL AND ORGANIC CLEANING EFFICIENCY OPTIMIZATION AND MONITORING FOR REAL-TIME, IN-LINE PROCESS CONTROL BY SURFACE PHOTOVOLTAGE
Jastrzebski, L. ; Henley, W. ; DeBusk, D. ; Haddad, N. ; Lowell, J. ; Wenner, V. ; Nauka, K. ; Persson, E.
Pub. info.: Proceedings of the Third International Symposium on Cleaning Technology in Semiconductor Device Manufacturing.  pp.530-536,  1994.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1994-7
2.

Conference Proceedings
Conference Proceedings
2. Small signal AC-surface photovoltage technique for non-contact monitoring of near surface doping and recombination-generation in the depletion layer
Marinskiy, D. ; Lagowski, J. ; Wilson, M. ; Savtchouk, A. ; Jastrzebski, L. ; DeBusk, D.
Pub. info.: Nondestructive methods for materials characterization : symposium held November 29-30, 1999, Boston, Massachusetts, U.S.A..  pp.225-,  2000.  Warrendale, Pa..  MRS-Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 591