Magnetron Sputtering of ITO and ZnO Films for Large Area Glass Coating

Magnetron Sputtering of ITO and ZnO Films for Large Area Glass Coating

Author(s):

C. May ( Von Ardenne Anlagentechnik GmbH, Germany )
J. Strümpfel ( Von Ardenne Anlagentechnik GmbH, Germany )
D. Schulze ( Von Ardenne Anlagentechnik GmbH, Germany )

Publication title:

43rd Annual Technical Conference proceedings, April 15-20, 2000, Denver, Colorado

Title of ser.:

Annual Technical Conference of Society of Vacuum Coaters

Ser. no.:

43

Pub. Year:

2000

Page(from):

137

Page(to):

142

Pages:

6

Pub. info.:

Albuquerque, NM: Society of Vacuum Coaters

ISSN:

07375921

Language:

English

Call no.:

A63930/43

Type:

Conference Proceedings

Details

TDL ID:	ZA00049381
Series ID:	PA00000013
Conf. info. (Name):	Annual Technical Conference Proceedings
Conf. info. (Number):	2000
Conf. info. (Venue):	Denver, Colorado USA
Conf. info. (Date):	2000.04.15-2000.04.20

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