Photon, beam, and plasma stimulated chemical processes at surfaces : symposium held December 1-4, 1986, Boston, Massachusetts, U.S.A.. pp.99-106, 1987. Pittsburgh, Pa.. Materials Research Society
Rapid thermal processing : symposium held December 2-4, 1985, Boston, Massachusetts, U.S.A.. pp.375-382, 1985. Pittsburgh, Pa.. Materials Research Society
Photon, beam, and plasma stimulated chemical processes at surfaces : symposium held December 1-4, 1986, Boston, Massachusetts, U.S.A.. pp.91-98, 1987. Pittsburgh, Pa.. Materials Research Society
Cummings, K.D. ; Schneider-Stoermann, L.U. ; Buttgereit, U. ; Irmscher, M. ; Mueller, D. ; Hudek, P. ; Beyer, D. ; Brendel, B. ; Whittey, J.M. ; Eynon, B.G. ; Harsch, J. ; Constantine, C. ; Miller, K.
Pub. info.:
22nd Annual BACUS Symposium on Photomask Technology. Part One pp.15-24, 2002. Bellingham, WA. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering