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Magnetron-Sputtered Metal-Amorphous Silicon Interfaces

Author(s):
Anderson, W. W.
Crowley, J. L.
Jonath, A. D.
MacMillan, H. F
Opyd, W. G.
Thornton, J. A.
1 more
Publication title:
Thin films and interfaces : proceedings of the Materials Research Society Annual Meeting, November 1981, Boston Park Plaza Hotel, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
10
Pub. Year:
1982
Page(from):
311
Page(to):
318
Pages:
8
Pub. info.:
New York: North-Holland
ISSN:
02729172
ISBN:
9780444007742 [0444007741]
Language:
English
Call no.:
M23500/10
Type:
Conference Proceedings

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