Design, test, integration, and packaging of MEMS/MOEMS 2001 : 25-27 April 2001, Cannes, France. pp.159-164, 2001. Bellingham, Washington. SPIE-The International Society for Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
Design, test, integration, and packaging of MEMS/MOEMS 2001 : 25-27 April 2001, Cannes, France. pp.96-103, 2001. Bellingham, Washington. SPIE-The International Society for Optical Engineering
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Design, test, integration, and packaging of MEMS/MOEMS 2001 : 25-27 April 2001, Cannes, France. pp.438-444, 2001. Bellingham, Washington. SPIE-The International Society for Optical Engineering
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Design, test, and microfabrication of MEMS and MOEMS : 30 March-1 April 1999, Paris, France. Part1 pp.398-405, 1999. Bellingham, Wash., USA. SPIE - The International Society for Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
Design, test, and microfabrication of MEMS and MOEMS : 30 March-1 April 1999, Paris, France. Part1 pp.298-305, 1999. Bellingham, Wash., USA. SPIE - The International Society for Optical Engineering
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1996 International Symposium on Microelectronics : 8-10 October 1996, Minneapolis Convention Center, Minneapolis, Minnesota. pp.18-23, 1996. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
Design, test, and microfabrication of MEMS and MOEMS : 30 March-1 April 1999, Paris, France. Part1 pp.70-77, 1999. Bellingham, Wash., USA. SPIE - The International Society for Optical Engineering
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Design, test, and microfabrication of MEMS and MOEMS : 30 March-1 April 1999, Paris, France. Part1 pp.161-170, 1999. Bellingham, Wash., USA. SPIE - The International Society for Optical Engineering
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Design, Test, Integration, and Packaging of MEMS/MOEMS : 9-11 May 2000, Paris, France. pp.39-49, 2000. Bellingham, Wash.. SPIE - The International Society for Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
Design, Test, Integration, and Packaging of MEMS/MOEMS : 9-11 May 2000, Paris, France. pp.145-152, 2000. Bellingham, Wash.. SPIE - The International Society for Optical Engineering
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Design, modeling, and simulation in microelectronics : 28-30 November 2000, Singapore. pp.9-20, 2000. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
Design, test, integration, and packaging of MEMS/MOEMS 2001 : 25-27 April 2001, Cannes, France. pp.289-300, 2001. Bellingham, Washington. SPIE-The International Society for Optical Engineering
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Sensors and camera systems for scientific, industrial, and digital photography applications II : 22-24 January 2001, San Jose, [California] USA. pp.93-99, 2001. Bellingham, Washington. SPIE-The International Society for Optical Engineering
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Design, characterization, and packaging for MEMS and microelectronics : 27-29 October 1999, Royal Pines Resort, Queensland, Australia. pp.94-103, 1999. Bellingham, Wash.. SPIE - The International Society for Optical Engineering
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Micromachining and microfabrication process technology II : 14-15 October, 1996, Austin, Texas. pp.315-326, 1996. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering