1.

Conference Proceedings

Conference Proceedings
Szekely,V. ; Rencz,M. ; Poppe,A. ; Courtois,B.
Pub. info.: Design, Test, Integration, and Packaging of MEMS/MOEMS : 9-11 May 2000, Paris, France.  pp.39-49,  2000.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4019
2.

Conference Proceedings

Conference Proceedings
Rencz,M. ; Szekely,V. ; Poppe,A. ; Courtois,B.
Pub. info.: Design, modeling, and simulation in microelectronics : 28-30 November 2000, Singapore.  pp.9-20,  2000.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4228
3.

Conference Proceedings

Conference Proceedings
Karam,J.-M. ; Courtois,B. ; Rencz,M. ; Poppe,A. ; Szekely,V.
Pub. info.: Microlithography and Metrology in Micromachining II.  pp.236-245,  1996.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2880
4.

Conference Proceedings

Conference Proceedings
Boutamine,H. ; Karam,J.M. ; Courtois,B. ; Drake,P. ; Oudinot,J. ; El Tahawi,H. ; Cao,A. ; Rencz,M. ; Poppe,A. ; Szekely,V.
Pub. info.: Microlithography and Metrology in Micromachining III.  pp.76-84,  1997.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3225
5.

Conference Proceedings

Conference Proceedings
Poppe,A. ; Rencz,M. ; Szekely,V. ; Karam,J.-M. ; Courtois,B. ; Hofmann,K. ; Glesner,M.
Pub. info.: Micromachined Devices and Components.  pp.215-224,  1995.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2642