1.

Conference Proceedings

Conference Proceedings
Trauwaert, M.-A. ; Vanhellemont, J. ; Simoen, E. ; Claeys, C. ; Johlander, B. ; Harboe-Sorensen, R. ; Adams, L. ; Clauws, P.
Pub. info.: Beam-solid interactions : fundamentals and applications : symposium held November 30-December 4, 1992, Boston, Massachusetts, U.S.A..  pp.93-98,  1993.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 279
2.

Conference Proceedings

Conference Proceedings
Lukyanchikova, N. R. ; Garbar, N. ; Smolanka, A. ; Simoen, E. ; Mercha, A. ; Claeys, C.
Pub. info.: Noise in devices and circuits II : 26-28 May 2004, Maspalomas, Gran Canaria, Spain.  pp.208-214,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5470
3.

Conference Proceedings

Conference Proceedings
Mercha, A. ; Simoen, E. ; Decoutere, S. ; Claeys, C.
Pub. info.: Noise in devices and circuits II : 26-28 May 2004, Maspalomas, Gran Canaria, Spain.  pp.193-207,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5470
4.

Conference Proceedings

Conference Proceedings
Simoen, E. ; Claeys, C. ; Job, R. ; Ulyashin, A.G. ; Fahrner, W.R. ; Tonelli, G. ; Degryse, O. ; Clauws, P.
Pub. info.: Semiconductor silicon 2002 : proceedings of the ninth International Symposium on Silicon Materials Science and Technology.  pp.912-924,  2002.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2002-2
5.

Conference Proceedings

Conference Proceedings
Ohyama, H. ; Simoen, E. ; Claeys, C. ; Takami, Y. ; Kawamura, K. ; Hakata, T. ; Sunaga, H. ; Ogita, Y.
Pub. info.: Proceedings of the Eighth International Symposium on Silicon-on-Insulator Technology and Devices.  pp.289-294,  1997.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 97-23
6.

Conference Proceedings

Conference Proceedings
Simoen, E. ; Claeys, C. ; Job, R. ; Ulyashin, A.G. ; Fahrner, W.R. ; Tonelli, G. ; Degryse, O. ; Clauws, P.
Pub. info.: Semiconductor silicon 2002 : proceedings of the ninth International Symposium on Silicon Materials Science and Technology.  pp.912-926,  2002.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2002-2
7.

Conference Proceedings

Conference Proceedings
Vanhellemont, J. ; Simoen, E. ; Bosman, G. ; Claeys, C. ; Kaniava, A. ; Gaubas, E. ; Blondeel, A. ; Clauws, P.
Pub. info.: Proceedings of the Seventh International Symposium on Silicon Materials Science and Technology.  pp.670-683,  1994.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1994-10
8.

Conference Proceedings

Conference Proceedings
Poyai, A. ; Simoen, E. ; Claeys, C. ; Rooyackers, R. ; Badenes, G. ; Gaubas, E.
Pub. info.: High Purity Silicon VI : proceedings of the sixth International Symposium.  pp.403-413,  2000.  Bellingham, Wash..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2000-17
9.

Conference Proceedings

Conference Proceedings
Croon, J. ; Biesemans, S. ; Kubicek, S. ; Simoen, E. ; De Meyer, K. ; Claeys, C.
Pub. info.: Proceedings of the fourth Symposium on Low Temperature Electronics and High Temperature Superconductivity.  pp.187-198,  1997.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 97-2
10.

Conference Proceedings

Conference Proceedings
Simoen, E. ; Claeys, C.
Pub. info.: Proceedings of the fourth Symposium on Low Temperature Electronics and High Temperature Superconductivity.  pp.117-139,  1997.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 97-2
11.

Conference Proceedings

Conference Proceedings
Czerwinski, A. ; Simoen, E. ; Poyai, A. ; Claeys, C.
Pub. info.: Proceedings of the Third International Symposium on Defects in Silicon.  pp.88-99,  1999.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 99-1
12.

Conference Proceedings

Conference Proceedings
Nicolett, A.S. ; Martino, J.A. ; Simoen, E. ; Claeys, C.
Pub. info.: Proceedings of the fourth Symposium on Low Temperature Electronics and High Temperature Superconductivity.  pp.159-170,  1997.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 97-2
13.

Conference Proceedings

Conference Proceedings
Kissinger, G. ; Vanhellemont, J. ; Graef, D. ; Zulehner, W. ; Claeys, C. ; Richter, H.
Pub. info.: ALTECH 95 : analytical techniques for semiconductor materials and process characterization II : proceedings of the Satellite Symposium to ESSDERC 95, The Hague, The Netherlands.  pp.156-164,  1995.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 95-30
14.

Conference Proceedings

Conference Proceedings
Litovchenko, V.G. ; Romanyuk, B.N. ; Efremov, A.A. ; Mel'nik, V.P. ; Claeys, C.
Pub. info.: Proceedings of the Eighth International Symposium on Silicon-on-Insulator Technology and Devices.  pp.81-85,  1997.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 97-23
15.

Conference Proceedings

Conference Proceedings
Libezny, M. ; Kaniava, A. ; Kissinger, G. ; Nijs, J. ; Claeys, C. ; Vanhellemont, J.
Pub. info.: ALTECH 95 : analytical techniques for semiconductor materials and process characterization II : proceedings of the Satellite Symposium to ESSDERC 95, The Hague, The Netherlands.  pp.165-172,  1995.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 95-30
16.

Conference Proceedings

Conference Proceedings
Neimash, V.B. ; Siratskii, V.M. ; Kraichinskii, A.M. ; Puzenko, O.O. ; Claeys, C. ; Simoen, E.
Pub. info.: Proceedings of the Fifth International Symposium on High Purity Silicon V.  pp.200-210,  1998.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 98-13
17.

Conference Proceedings

Conference Proceedings
Simoen, E. ; Poyai, A. ; Claeys, C. ; Czerwinski, A. ; Katcki, J.
Pub. info.: Silicon materials science and technology : proceedings of the Eighth International Symposium on Silicon Materials Science and Technology.  pp.1576-1592,  1998.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 98-1(2)
18.

Conference Proceedings

Conference Proceedings
Simoen, E. ; Mercha, A. ; Claeys, C.
Pub. info.: Silicon nitride and silicon dioxide thin insulating films VII : proceedings of the international symposium.  pp.153-172,  2003.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2003-2
19.

Conference Proceedings

Conference Proceedings
Rotondaro, A.L.P. ; Meuris, M. ; Schmidt, H.F. ; Heyns, M.M. ; Vandervorst, W. ; Claeys, C. ; Hellemans, L. ; Snauvaert, I.
Pub. info.: Proceedings of the Third International Symposium on Cleaning Technology in Semiconductor Device Manufacturing.  pp.581-586,  1994.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1994-7
20.

Conference Proceedings

Conference Proceedings
Lukyanchikova, N. ; Petrichuk, M. ; Garbar, N. ; Simoen, E. ; Claeys, C.
Pub. info.: Proceedings of the Eighth International Symposium on Silicon-on-Insulator Technology and Devices.  pp.203-214,  1997.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 97-23
21.

Conference Proceedings

Conference Proceedings
Dierickx, B. ; Simoen, E. ; Vermeiren, J. ; Cos, S. ; Claeys, C. ; Declerck, G.
Pub. info.: Proceedings of the ESA Electronic Components Conference, held at the Conference Centre, ESTEC, Noordwijk, the Netherlands, 12-16 November 1990.  pp.43-48,  1991.  Paris.  ESA Publications Division
Title of ser.: ESA SP
Ser. no.: 313
22.

Conference Proceedings

Conference Proceedings
Camillo, L.M. ; Martino, J.A. ; Simoen, E. ; Claeys, C.
Pub. info.: Silicon-on-insulator technology and devices XII : proceedings of the international symposium.  pp.119-124,  2005.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2005-03
23.

Conference Proceedings

Conference Proceedings
Srinivasan, P. ; Simoen, E. ; Pantisano, L. ; Claeys, C. ; Misra, D.
Pub. info.: Advanced gate stack, source/drain and channel engineering for Si-based CMOS, new materials, processes, and equipment : proceedings of the international symposium.  pp.151-160,  2005.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2005-05
24.

Conference Proceedings

Conference Proceedings
Poyai, A. ; Rittaporn, I. ; Simoen, E. ; Claeys, C. ; Rooyackers, R.
Pub. info.: High purity silicon VIII : proceedings of the international symposium.  pp.307-316,  2004.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2004-05
25.

Conference Proceedings

Conference Proceedings
Ulyashin, A. ; Simoen, E. ; Camel, L. ; De Wolf, S. ; Dekkers, H. ; Rafi, J.M. ; Beaucarne, G. ; Poortmans, J. ; Claeys, C.
Pub. info.: High purity silicon VIII : proceedings of the international symposium.  pp.334-345,  2004.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2004-05
26.

Conference Proceedings

Conference Proceedings
Neimash, M.V. ; Kras'ko, M. ; Kraitchinskii, A, ; Voytovych, V. ; Kabaldin, O. ; Tsmots, V. ; Simoen, E. ; Claeys, C.
Pub. info.: High purity silicon VIII : proceedings of the international symposium.  pp.286-294,  2004.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2004-05
27.

Conference Proceedings

Conference Proceedings
Martino, J.A. ; Rafi, J.M. ; Mercha, A. ; Simoen, E. ; Claeys, C.
Pub. info.: High purity silicon VIII : proceedings of the international symposium.  pp.346-356,  2004.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2004-05
28.

Conference Proceedings

Conference Proceedings
Claeys, C. ; Simoen, E.
Pub. info.: Proceedings of the Ninth International Symposium on Silicon-on-Insulator Technology and Devices.  pp.36-50,  1999.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 99-3
29.

Conference Proceedings

Conference Proceedings
Simoen, E. ; Claeys, C. ; Neimash, V.B. ; Kraitchinskii, A. ; Kras'ko, M. ; Puzenko, O. ; Blondeel, A. ; Clauws, P.
Pub. info.: High Purity Silicon VI : proceedings of the sixth International Symposium.  pp.223-235,  2000.  Bellingham, Wash..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2000-17
30.

Conference Proceedings

Conference Proceedings
Simoen, E. ; Rafi, J.M. ; Mercha, A. ; De Meyer, K. ; Claeys, C. ; Kokkoris, M. ; Kossionides, E. ; Fanourakis, G. ; Mohhaindzadeh, A.
Pub. info.: Microelectronics technology and devices : SBMICRO 2003 : proceedings of the eighteenth international symposium.  pp.18-27,  2003.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2003-9
31.

Conference Proceedings

Conference Proceedings
Gaubas, E. ; Vanhellemont, J. ; Simoen, E. ; Claeys, C. ; Clauws, P. ; Kraner, H.W. ; Vilkelis, G.
Pub. info.: Proceedings of the Fourth International Symposium on High Purity Silicon.  pp.439-449,  1996.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 96-13
32.

Conference Proceedings

Conference Proceedings
Simoen, E. ; Poyai, A. ; Claeys, C. ; Czerwinski, A.
Pub. info.: Proceedings of the Fifth International Symposium on High Purity Silicon V.  pp.410-421,  1998.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 98-13
33.

Conference Proceedings

Conference Proceedings
Czerwinski, A. ; Tomaszewski, D. ; Gibki, J. ; Bakowski, A. ; Klima, K. ; Katcki, J. ; Simoen, E. ; Claeys, C.
Pub. info.: Proceedings of the Symposium on Crystalline Defects and Contamination, their Impact and Control in Device Manufacturing II.  pp.218-227,  1997.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 97-22
34.

Conference Proceedings

Conference Proceedings
Ohyama, H. ; Simoen, E. ; Claeys, C. ; Vanhellemont, J. ; Takami, Y. ; Hayama, T. ; Sunaga, H. ; Kobayashi, K.
Pub. info.: Proceedings of the Symposium on Crystalline Defects and Contamination, their Impact and Control in Device Manufacturing II.  pp.143-152,  1997.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 97-22
35.

Conference Proceedings

Conference Proceedings
David, M.-L. ; Simoen, E. ; Claeys, C. ; Neimash, V. ; Kras'ko, M. ; Kraitchinski, A. ; Voytovuch, V. ; Tishcenko, V. ; Barbot, J.F.
Pub. info.: High purity silicon VIII : proceedings of the international symposium.  pp.395-406,  2004.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2004-05
36.

Conference Proceedings

Conference Proceedings
Evtukh, A. ; Kizjak, A. ; Litovchenko, V. ; Claeys, C. ; Simoen, E.
Pub. info.: Science and technology of semiconductor-on-insulator structures and devices operating in a harsh environment.  pp.221-226,  2005.  Dordrecht.  Kluwer Academic Publishers
Title of ser.: NATO science series. Series 2, Mathematics, physics and chemistry
Ser. no.: 185
37.

Conference Proceedings

Conference Proceedings
Claeys, C. ; Simoen, E.
Pub. info.: Advanced short-time thermal processing for Si-based CMOS devices : proceedings of the international symposium.  pp.50-65,  2004.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2004-01
38.

Conference Proceedings

Conference Proceedings
Hakata, T. ; Ohyama, H. ; Simoen, E. ; Claeys, C. ; Takami, Y. ; Kawamura, K. ; Miyahara, K. ; Hososhima, M.
Pub. info.: Semiconductors for room-temperature radiation detector applications II : symposium held December 1-5, 1997, Boston, Massachusetts, U.S.A..  pp.387-,  1997.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 487
39.

Conference Proceedings

Conference Proceedings
Kudou, T. ; Ohyama, H. ; Simoen, E. ; Claeys, C. ; Takami, Y. ; Shigaki, K. ; Fujii, A. ; Sunaga, H.
Pub. info.: Semiconductors for room-temperature radiation detector applications II : symposium held December 1-5, 1997, Boston, Massachusetts, U.S.A..  pp.471-,  1997.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 487
40.

Conference Proceedings

Conference Proceedings
Hakata, T. ; Ohyama, H. ; Simoen, E. ; Claeys, C. ; Sunaga, H. ; Kobayashi, K. ; Hososhima, M.
Pub. info.: Semiconductors for room-temperature radiation detector applications II : symposium held December 1-5, 1997, Boston, Massachusetts, U.S.A..  pp.435-,  1997.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 487
41.

Conference Proceedings

Conference Proceedings
Ohyama, H. ; Hakata, T. ; Simoen, E. ; Claeys, C. ; Takami, Y. ; Hayama, K. ; Tokuyama, J. ; Shigaki, K. ; Kobayashi, K. ; Sunaga, H. ; Miyahara, K. ; Hososhima, M.
Pub. info.: Semiconductors for room-temperature radiation detector applications II : symposium held December 1-5, 1997, Boston, Massachusetts, U.S.A..  pp.429-,  1997.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 487
42.

Conference Proceedings

Conference Proceedings
Rotondaro, A. L. P. ; Hurd, T. Q. ; Schmidt, H. F. ; Teerlinck, I. ; Heyns, M. M. ; Claeys, C.
Pub. info.: Ultraclean semiconductor processing technology and surface chemical cleaning and passivation : Symposum held April 17-19, 1995, San Francisco, California, USA.  pp.183-,  1995.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 386
43.

Conference Proceedings

Conference Proceedings
Ohyama, H. ; Simoen, E. ; Claeys, C. ; Takami, Y. ; Hayama, K. ; Hakata, T. ; Tokuyama, J. ; Kobayashi, K. ; Sunaga, H. ; Poortmans, J. ; Caymax, M.
Pub. info.: Epitaxy and applications of si-based heterostructures : symposium held April 13-17, 1998, San Francisco, California, U.S.A..  pp.99-,  1998.  Warrendale, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 533
44.

Conference Proceedings

Conference Proceedings
Job, R. ; Ulyashin, A.G. ; Huang, Y.L. ; Fahrner, W.R. ; Simoen, E. ; Claeys, C. ; Niedernostheide, F.-J. ; Schulze, H.-J. ; Tonelli, G.
Pub. info.: Defect and impurity engineered semiconductors and devices III : symposium held April 1-5, 2002, San Francisco, California, U.S.A..  pp.257-262,  2002.  Warrendale, Pa.  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 719
45.

Conference Proceedings

Conference Proceedings
Simoen, E. ; Heyns, M.M. ; Claeys, C. ; Brown, G.
Pub. info.: ALTECH 95 : analytical techniques for semiconductor materials and process characterization II : proceedings of the Satellite Symposium to ESSDERC 95, The Hague, The Netherlands.  pp.54-63,  1995.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 95-30
46.

Conference Proceedings

Conference Proceedings
Simoen, E. ; Mercha, A. ; Claeys, C.
Pub. info.: Analytical and diagnostic techniques for semiconductor materials, devices, and processes : joint proceedings of the symposia on: ALTECH 2003, Analytical Techniques for Semiconductor Materials and Process Characterization IV, Paris, France and the 202nd Meeting of the Electrochemical Society, Diagnostic Techniques for Semiconductor Materials and Devices VI, Salt Lake City, Utah.  pp.420-439,  2003.  Pennington, NJ.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5133
47.

Conference Proceedings

Conference Proceedings
Rafi, J.M. ; Simoen, E. ; Claeys, C. ; Ulyashin, A. ; Job, R. ; Fahrner, W. ; Versluys, J. ; Clauws, P. ; Lozano, M. ; Campabadal, F.
Pub. info.: Analytical and diagnostic techniques for semiconductor materials, devices, and processes : joint proceedings of the symposia on: ALTECH 2003, Analytical Techniques for Semiconductor Materials and Process Characterization IV, Paris, France and the 202nd Meeting of the Electrochemical Society, Diagnostic Techniques for Semiconductor Materials and Devices VI, Salt Lake City, Utah.  pp.96-105,  2003.  Pennington, NJ.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5133
48.

Conference Proceedings

Conference Proceedings
Agopian, P. G. ; Martino, J. A. ; Simoen, E. ; Claeys, C.
Pub. info.: Microelectronics technology and devices : SBMICRO 2005 : proceedings of the twentieth international symposium.  pp.512-519,  2005.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2005-08
49.

Conference Proceedings

Conference Proceedings
Galeti, M. ; Martino, J. A. ; Simoen, E. ; Claeys, C.
Pub. info.: Microelectronics technology and devices : SBMICRO 2005 : proceedings of the twentieth international symposium.  pp.538-547,  2005.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2005-08
50.

Conference Proceedings

Conference Proceedings
Simoen, E. ; Hayama, K. ; Takakura, K. ; Mercha, A. ; Claeys, C. ; Ohyama, H.
Pub. info.: Microelectronics technology and devices : SBMICRO 2005 : proceedings of the twentieth international symposium.  pp.455-463,  2005.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2005-08