Hargrave, B. ; Irwin, B. ; Parkhill, R. ; Church, K.H. ; Nguyen, M.N. ; Kachurin, A. ; Warren, W.L.
Pub. info.:
Smart structures and materials 2004 : smart electronics, MEMS, BioMEMS, and nanotechnology : 15-18 March 2004, San Diego, California, USA. pp.114-125, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Micromachining Technology for Micro-Optics and Nano-Optics. pp.156-163, 2003. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering