HYDROGENATED AMORPHOUS SILICON FILMS BY THE PYROLYSIS OF DISILANE
- Author(s):
Chu, T.L. Chu, S.S. Ang, S.T. Lo, D.H. Duong, A. Hwaung, C.G. Book, L. - Publication title:
- Materials issues in applications of amorphous silicon technology : symposium held April 15-17, 1985, San Francisco, California, U.S.A.
- Title of ser.:
- Materials Research Society symposium proceedings
- Ser. no.:
- 49
- Pub. Year:
- 1985
- Page(from):
- 21
- Page(to):
- 26
- Pages:
- 6
- Pub. info.:
- Pittsburgh, Pa.: Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9780931837142 [0931837146]
- Language:
- English
- Call no.:
- M23500/49
- Type:
- Conference Proceedings
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