Katz, A. ; Chu, S. N. G. ; Thomas, P. M ; Dautremont-Smith, W. C.
Pub. info.:
Rapid thermal annealing/chemical vapor deposition and integrated processing : sympoisium held April 25-28, 1989, San Diego, California, U.S.A.. pp.405-412, 1989. Pittsburgh, Pa.. Materials Research Society
Savin, W. ; Weir, B. E. ; Katz, A. ; Chu, S. N. G. ; Nakahara, S. ; Harris, D. W.
Pub. info.:
Advanced metallizations in microelectronics : symposium held April 16-20, 1990, San Francisco, California, U.S.A.. pp.227-232, 1990. Pittsburgh, Pa.. Materials Research Society
Chu, S. N. G. ; Katz, A. ; Boone, T. ; Thomas, P. M. ; Riggs, V. G. ; Dautremont-Smith, W. C. ; Johnson Jr., W. D.
Pub. info.:
Advanced metallizations in microelectronics : symposium held April 16-20, 1990, San Francisco, California, U.S.A.. pp.389-400, 1990. Pittsburgh, Pa.. Materials Research Society
Pearton, S. J. ; Ren, F. ; Abernathy, C. R. ; Katz, A. ; Hobson, W. S. ; Chu, S. N. G. ; Kovalchick, J.
Pub. info.:
Advanced metallizations in microelectronics : symposium held April 16-20, 1990, San Francisco, California, U.S.A.. pp.491-496, 1990. Pittsburgh, Pa.. Materials Research Society
Katz, A. ; Dautremont-Smith, W. C. ; Chu, S. N. G. ; Pearton, S. J. ; Geva, M. ; Weir, B. E. ; Thomas, P. M. ; Kimerling, L. C.
Pub. info.:
Advanced metallizations in microelectronics : symposium held April 16-20, 1990, San Francisco, California, U.S.A.. pp.401-410, 1990. Pittsburgh, Pa.. Materials Research Society