1.

Conference Proceedings
Conference Proceedings
1. Piezoelectric Force Sensing Pb(Zr,Ti)O3 Microcantilever Array for Multiprobe Scanning Force Microscopy
Itoh, T. ; Lee, C. ; Chu, J. ; Suga, T.
Pub. info.: Materials for mechanical and optical microsystems : symposium held December 4-5, 1996, Boston, Massachusetts,U.S.A..  pp.59-,  1997.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 444
2.

Conference Proceedings
Conference Proceedings
2. Smart Piezoelectric PZT Microcantilevers with Inherent Sensing and Actuating Abilities for AFM and LFM
Lee, C. ; Itoh, T. ; Chu, J. ; Ohashi, T. ; Maeda, R. ; Schroth, A. ; Suga, T.
Pub. info.: Materials for smart systems II : sympsoium held December 2-5, 1996, Boston, Massachusetts, U.S.A..  pp.35-,  1997.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 459
3.

Conference Proceedings
Conference Proceedings
3. Microsensors and actuator arrays based on Pb(Zr,Ti) O3 thin film for AFM data storage
Chu, J. ; Lu, J. ; Wu, Y. ; Huang, W. ; Maeda, R. ; Itoh, T. ; Suga, T.
Pub. info.: Micromachining and Microfabrication Process Technology and Devices.  pp.379-383,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4601