1.
Conference Proceedings
Kim, J.-W. ; Ki, W.-T. ; Jang, S.-H. ; Choi, J.-H. ; Choi, S.-W. ; Han, W.-S.
Pub. info.:
Photomask Technology 2006 . pp.63493X-, 2006. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6349
2.
Conference Proceedings
Jang, S.-H. ; Zinn, S.Y. ; Ki, W.-T. ; Choi, J.-H. ; Jeon, C-U. ; Choi, S.-W. ; Yoon, H,-S. ; Sohn, J.M. ; Oh, Y.-H. ; Lee, J.-C. ; Lim, S.
Pub. info.:
22nd Annual BACUS Symposium on Photomask Technology . Part One pp.520-529, 2002. Bellingham, WA. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4889
3.
Conference Proceedings
Jang, S.-H. ; Yang, S.-H. ; Ahn, B.-S. ; Ki, W.-T. ; Choi, J.-H. ; Choi, S.-W. ; Han, W.-S.
Pub. info.:
Photomask and Next-Generation Lithography Mask Technology XI . pp.669-674, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5446
4.
Conference Proceedings
Kim, M.-Y. ; Ki, W.-T. ; Lee, S.-H. ; Choi, J.-H. ; Choi, S.-W. ; Sohn, J.-M.
Pub. info.:
23rd Annual BACUS Symposium on Photomask Technology . pp.50-58, 2003. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5256