1.

Conference Proceedings

Conference Proceedings
Kim, J.-W. ; Ki, W.-T. ; Jang, S.-H. ; Choi, J.-H. ; Choi, S.-W. ; Han, W.-S.
Pub. info.: Photomask Technology 2006.  pp.63493X-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6349
2.

Conference Proceedings

Conference Proceedings
Jang, S.-H. ; Zinn, S.Y. ; Ki, W.-T. ; Choi, J.-H. ; Jeon, C-U. ; Choi, S.-W. ; Yoon, H,-S. ; Sohn, J.M. ; Oh, Y.-H. ; Lee, J.-C. ; Lim, S.
Pub. info.: 22nd Annual BACUS Symposium on Photomask Technology.  Part One  pp.520-529,  2002.  Bellingham, WA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4889
3.

Conference Proceedings

Conference Proceedings
Jang, S.-H. ; Yang, S.-H. ; Ahn, B.-S. ; Ki, W.-T. ; Choi, J.-H. ; Choi, S.-W. ; Han, W.-S.
Pub. info.: Photomask and Next-Generation Lithography Mask Technology XI.  pp.669-674,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5446
4.

Conference Proceedings

Conference Proceedings
Kim, M.-Y. ; Ki, W.-T. ; Lee, S.-H. ; Choi, J.-H. ; Choi, S.-W. ; Sohn, J.-M.
Pub. info.: 23rd Annual BACUS Symposium on Photomask Technology.  pp.50-58,  2003.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5256