Cho, H.-S. ; Takehiro, S. ; Sakuraba, M. ; Murota, J.(Tohoku University)
Pub. info.:
SiGe: materials, processing, and devices : proceedings of the First international symposium. pp.243-250, 2004. Pennington, N.J.. Electrochemical Society
22nd Annual BACUS Symposium on Photomask Technology. Part Two pp.1253-1262, 2002. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering