1.

Conference Proceedings
Conference Proceedings
1. Dynamic actuation behavior of NiTi/Si diaphragm micropump
Xu,D. ; Wang,L. ; Ding,G. ; Zhou,Y. ; Yu,A. ; Cheng,X. ; Chen,J. ; Cai,B.
Pub. info.: Micromachining and microfabrication process technology VI : 18-20 September 2000, Santa Clara, USA.  pp.324-330,  2000.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4174
2.

Conference Proceedings
Conference Proceedings
2. Control of internal stress in SMA/Si bimorph microactuators
Wang,L. ; Xu,D. ; Cai,B. ; Cheng,X.
Pub. info.: Micromachining and microfabrication process technology VI : 18-20 September 2000, Santa Clara, USA.  pp.340-345,  2000.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4174
3.

Conference Proceedings
Conference Proceedings
3. Diffraction analysis of optical disk readout signal deterioration caused by decline of groove wall
Cheng,X. ; Jia,H. ; Xu,D.
Pub. info.: Fifth International Symposium on Optical Storage (ISOS 2000) : 22-26 May 2000, Shanghai, China.  pp.244-248,  2000.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4085