Laser plasma generation and diagnostics : 27 January 2000, San Jose, California. pp.48-56, 2000. Bellingham, Wash.. SPIE - The International Society for Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
Laser plasma generation and diagnostics : 27 January 2000, San Jose, California. pp.57-65, 2000. Bellingham, Wash.. SPIE - The International Society for Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
Advances in resist technology and processing XV : 23-25 February 1998, Santa Clara, California. Part 2 pp.1124-1131, 1998. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering