Lu, Y.F. ; Takai, M. ; Sanda, H. ; Chayahara, A. ; Satou, M. ; Minamisono, T. ; Namba, S.
Pub. info.:
In-situ patterning : selective area deposition and etching : symposium held November 29-December 1, 1989, Boston, Massachusetts, U.S.A.. pp.301-306, 1990. Pittsburgh, Pa.. Materials Research Society
Fukumi, K. ; Chayahara, A. ; Hayakawa, J. ; Satou, M.
Pub. info.:
Surface chemistry and beam-solid interactions : symposium held November 26-29, 1990, Boston, Massachusetts, U.S.A.. pp.241-246, 1991. Pittsburgh, Pa.. Materials Research Society
Fukumi, K. ; Chayahara, A. ; Adachi, M. ; Kadono, K. ; Sakaguchi, T. ; Miya, M. ; Horino, Y. ; Kitamura, N. ; Hayakawa, J. ; Yamashita, H. ; Fujii, K. ; Satou, M.
Pub. info.:
Phase formation and modification by beam-solid interactions : symposium held December 2-6, 1991, Boston, Massachusetts, U.S.A.. pp.389-394, 1992. Pittsburgh, Pa.. Materials Research Society