Microelectronic device technology II : 23-24 September, 1998, Santa Clara, California. pp.30-40, 1998. Bellingham, Washington. SPIE-The International Society for Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
Microelectronic Device and Multilevel Interconnection Technology II. pp.244-248, 1996. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
Microelectronic Device and Multilevel Interconnection Technology. pp.115-123, 1995. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering