Design, test, integration, and packaging of MEMS/MOEMS 2001 : 25-27 April 2001, Cannes, France. pp.159-164, 2001. Bellingham, Washington. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Design, test, integration, and packaging of MEMS/MOEMS 2001 : 25-27 April 2001, Cannes, France. pp.96-103, 2001. Bellingham, Washington. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Design, test, and microfabrication of MEMS and MOEMS : 30 March-1 April 1999, Paris, France. Part1 pp.398-405, 1999. Bellingham, Wash., USA. SPIE - The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Design, test, and microfabrication of MEMS and MOEMS : 30 March-1 April 1999, Paris, France. Part1 pp.70-77, 1999. Bellingham, Wash., USA. SPIE - The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering