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Introducing Advanced ULK Dielectric Mateials in Interconnects: Performance and Integration Challenges

Author(s):
Fusalba, F. ( K. Haxaire, T. Mourier, P.H Haumesser, S. Maitrejean, J. Simon, )
Cornec, C.Le ( K. Haxaire, T. Mourier, P.H Haumesser, S. Maitrejean, J. Simon, )
Maury, P. ( K. Haxaire, T. Mourier, P.H Haumesser, S. Maitrejean, J. Simon, )
Remiat, B. ( K. Haxaire, T. Mourier, P.H Haumesser, S. Maitrejean, J. Simon, )
Jousseaume, V. ( K. Haxaire, T. Mourier, P.H Haumesser, S. Maitrejean, J. Simon, )
Haxaire, K.
Mourier, T.
Haumesser, P.H
Maitrejean, S.
Simon, J.
Chabli, A.
Passemard, G.
7 more
Publication title:
Thin film materials, processes, and reliability, plasma processing for the 100 nm node and copper interconnects with low-k inter-level dielectric films : proceedings of the international symposium
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2003-13
Pub. Year:
2003
Page(from):
186
Page(to):
205
Pages:
20
Pub. info.:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566773935 [1566773938]
Language:
English
Call no.:
E23400/200313
Type:
Conference Proceedings

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