1.

Conference Proceedings
Conference Proceedings
1. Characterization methods for semiconductor materials and device processing
Oppoizer, H. ; Budde, K. ; Cerva, H. ; Criegern, R.v. ; Jahnel, F. ; Lemme, R.
Pub. info.: Proceedings of the Symposium on Crystalline Defects and Contamination, their Impact and Control in Device Manufacturing II.  pp.351-362,  1997.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 97-22
2.

Conference Proceedings
Conference Proceedings
2. Characterization of Process-Induced Defects in Silicon Technology
Cerva, H. ; Hammerl, E. ; Lemme, R. ; Schwalke, U. ; Wangemann, K. ; Zoth, G.
Pub. info.: Proceedings of the Third International Symposium on Defects in Silicon.  pp.55-67,  1999.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 99-1